Title | High Quality Ge Grown on Si for Photonics Device Integration into BiCMOS |
Author | Y. Yamamoto, P. Zaumseil, S. Lischke, D. Knoll, L. Zimmermann (IHP, Germany), J. Murota (Tohoku Univ., Japan), B. Tillack (IHP, TU. Berlin, Germany) |
Title | Atomically Controlled Processing of Group IV Semiconductors by CVD for Ultralarge Scale Integration |
Author | J. Murota, M. Sakuraba (Tohoku Univ., Japan), B. Tillack (IHP, TU Berlin, Germany) |