Title | (Invited Paper) In-Depth 3D Elemental Analysis in Nano-Scale Transistor Structures by Atom Probe Tomography |
Author | *Yasuyoshi Nagai, Yasuo Shimizu, Hisashi Takamizawa, Koji Inoue, Fumiko Yano (Tohoku Univ., Japan) |
Page | pp. 77 - 78 |
Title | Application of Atom Probe Tomography to Epitaxial Layers |
Author | *Arul Kumar (IMEC, IKS, KU Leuven, Belgium), Matthieu Gilbert (IMEC, Belgium), Ajay Kumar Kambham (IMEC, IKS, KU Leuven, Belgium), Federica Gencarelli, Loo Roger (IMEC, Belgium), Wilfried Vandervorst (IMEC, IKS, KU Leuven, Belgium) |
Page | pp. 79 - 80 |
Title | Tensile-Strained Germanium Microdisks |
Author | *Moustafa El Kurdi, Abdel-Hamid Ghrib, Malo de Kersauson (Univ. of Paris-Sud, France), Mathias Prost (IEF CNRS - Univ. of Paris-Sud/STMicroelectronics, France), Sebastien Sauvage, Xavier Checoury (Univ. of Paris-Sud, France), Grégoire Beaudoin, Isabelle Sagnes (CNRS - UPR 20, France), Gerald Ndong, Marc Chaigneau, Razvigor Ossikovski (Ecole Polytechnique, France), Philippe Boucaud (Univ. of Paris-Sud, France) |
Page | pp. 81 - 82 |