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The 8th International Conference on Silicon Epitaxy and Heterostructures (ICSI-8) and
the 6th International Symposium on Control of Semiconductor Interfaces (ISCSI-VI)

Session A8  Nano-Analyses & Microstructures
Time: 10:50 - 12:00 Wednesday, June 5, 2013
Chairs: A. Nikiforov (Rzhanov Institute of Semiconductor Physics SB RAS, Russian Federation), Y. Nagai (Tohoku Univ., Japan)

A8-1 (Time: 10:50 - 11:20)
Title(Invited Paper) In-Depth 3D Elemental Analysis in Nano-Scale Transistor Structures by Atom Probe Tomography
Author*Yasuyoshi Nagai, Yasuo Shimizu, Hisashi Takamizawa, Koji Inoue, Fumiko Yano (Tohoku Univ., Japan)
Pagepp. 77 - 78

A8-2 (Time: 11:20 - 11:40)
TitleApplication of Atom Probe Tomography to Epitaxial Layers
Author*Arul Kumar (IMEC, IKS, KU Leuven, Belgium), Matthieu Gilbert (IMEC, Belgium), Ajay Kumar Kambham (IMEC, IKS, KU Leuven, Belgium), Federica Gencarelli, Loo Roger (IMEC, Belgium), Wilfried Vandervorst (IMEC, IKS, KU Leuven, Belgium)
Pagepp. 79 - 80

A8-3 (Time: 11:40 - 12:00)
TitleTensile-Strained Germanium Microdisks
Author*Moustafa El Kurdi, Abdel-Hamid Ghrib, Malo de Kersauson (Univ. of Paris-Sud, France), Mathias Prost (IEF CNRS - Univ. of Paris-Sud/STMicroelectronics, France), Sebastien Sauvage, Xavier Checoury (Univ. of Paris-Sud, France), Grégoire Beaudoin, Isabelle Sagnes (CNRS - UPR 20, France), Gerald Ndong, Marc Chaigneau, Razvigor Ossikovski (Ecole Polytechnique, France), Philippe Boucaud (Univ. of Paris-Sud, France)
Pagepp. 81 - 82